Browsing by Subject "Thermal, properties, pressure-dependent, elastic, constants,cadmium, stannate, substrate, MEMS, ab, initio, study"
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Thermal properties and pressure-dependent elastic constants of cadmium stannate as a substrate for MEMS: An ab initio study
(Physica B: Condensed Matter, 2023-02-15)Silicon carbide (SiC) has become a suitable replacement to silicon as a substrate for manufacture of microelectromechanical systems (MEMS) that operate in harsh environmental conditions, owing to its better mechanical ...